In the dynamic and highly competitive semiconductor industry, lithography plays a crucial role in the production of microelectronic devices. As manufacturers strive for higher resolutions and greater efficiencies, the Nikon NSR-2005 I11 and I12 C/D Steppers emerge as premier solutions. These advanced lithography systems are engineered to meet the rigorous demands of modern semiconductor fabrication, offering exceptional performance and versatility. This article will explore the detailed specifications, features, applications, and performance metrics of the Nikon NSR-2005 series, while also highlighting our expertise as a professional refurbishment factory for second-hand equipment.
Technical Specifications
The Nikon NSR-2005 I11 and I12 models are designed with cutting-edge technology to facilitate high-resolution semiconductor production. The following table outlines their key specifications:
| Specification | NSR-2005 I11 | NSR-2005 I12 |
|---|---|---|
| Resolution | 0.25 µm | 0.18 µm |
| Wafer Size | 200 mm | 300 mm |
| Optical System | F2.0 Lens | F2.0 Lens |
| Light Source | Mercury Vapor Lamp | Mercury Vapor Lamp |
| Alignment System | 2D and 3D Alignment | 2D and 3D Alignment |
| Maximum Exposure Speed | 0.15 m/s | 0.2 m/s |
| Numerical Aperture (NA) | 0.75 | 0.85 |
| Field Size | 26 mm × 33 mm | 26 mm × 33 mm |
| Scan Speed | Up to 200 mm/s | Up to 250 mm/s |
| Weight | 4,500 kg | 4,800 kg |
Comparison of I11 and I12 Variants
The Nikon NSR-2005 I11 and I12 models are tailored for different applications, particularly distinguished by their resolution capabilities and wafer size compatibility. While the I11 model offers a resolution of 0.25 µm and is optimized for various applications, the I12 model, with a resolution of 0.18 µm, is specifically designed for advanced technologies that require tighter geometries.
Key Features
The Nikon NSR-2005 series is characterized by a variety of features that enhance both productivity and precision in semiconductor manufacturing:
1. Advanced Lithography Technology
The NSR-2005 models utilize state-of-the-art lithography techniques, including:
Optical Proximity Correction (OPC): This technology compensates for distortions in the lithography process, allowing for more accurate replication of complex patterns. OPC ensures that the features printed on the wafer are consistent with the design specifications.
Sub-resolution Assist Features (SRAFs): SRAFs improve the fidelity of the printed patterns by adding features that enhance the printing of nearby critical features without affecting the overall design.
2. Alignment and Overlay Accuracy
Precise alignment between layers is critical in semiconductor manufacturing, especially for devices with multiple layers. The NSR-2005 series boasts:
High-Precision Alignment Systems: Both the I11 and I12 models achieve remarkable overlay accuracies, with the I12 providing ±20 nm and the I11 offering ±25 nm. This precision is vital for the fabrication of complex devices, such as microprocessors and high-density memory chips.
2D and 3D Alignment Technologies: These technologies ensure that layers are accurately registered, facilitating multi-layer fabrication with minimal defects.
3. Productivity Enhancements
In today's competitive market, throughput is a key factor in profitability. The NSR-2005 series is designed to maximize production efficiency:
High Throughput Rates: The I11 model can process up to 75 wafers per hour, while the I12 can achieve throughputs of up to 80 wafers per hour. This high throughput significantly enhances production capabilities and efficiency.
Smart Automation Features: The models include automated wafer handling systems that reduce idle time between exposures, further increasing operational efficiency. Automation also minimizes human error, contributing to consistent production quality.
4. User-Friendly Interface
The user experience is enhanced through an intuitive interface:
Touchscreen Controls: These allow operators to easily manage and monitor the lithography process, facilitating quick adjustments when needed.
Real-Time Diagnostics: The systems provide immediate feedback on operational parameters, enabling operators to quickly troubleshoot issues and maintain optimal performance.
Applications in Semiconductor Manufacturing
The Nikon NSR-2005 I11/I12 C/D models are versatile tools employed across various semiconductor manufacturing applications, demonstrating their adaptability and reliability. Key applications include:
1. Microprocessors
The advanced resolution and precision of the I12 model make it particularly suited for the fabrication of high-performance microprocessors, which require intricate patterning to achieve optimal performance.
2. Memory Devices
Both the I11 and I12 models are effective in the production of memory devices, including DRAM and NAND flash. These applications demand high precision and throughput, both of which are hallmarks of the NSR-2005 series.
3. Radio Frequency (RF) Devices
The production of RF components, crucial for telecommunications and mobile devices, benefits significantly from the precision lithography capabilities of the NSR-2005 series.
4. Advanced Packaging Technologies
The ability to achieve high resolutions and excellent alignment makes these models ideal for advanced packaging technologies, including System-in-Package (SiP) and Multi-Chip Modules (MCMs), which are essential for modern electronic devices.
Performance Metrics
Performance metrics are vital for evaluating the efficiency and reliability of the Nikon NSR-2005 series. The following table summarizes key performance metrics:
| Metric | NSR-2005 I11 | NSR-2005 I12 |
|---|---|---|
| Throughput | 75 wafers/hour | 80 wafers/hour |
| Overlay Accuracy | ±25 nm | ±20 nm |
| Defect Density | < 0.1 defects/cm² | < 0.05 defects/cm² |
| Mean Time Between Failures (MTBF) | 5000 hours | 6000 hours |
| Field Depth | 10 µm | 12 µm |
Our Expertise in Refurbishment
At JUNR, we specialize in the refurbishment of high-quality semiconductor manufacturing equipment, including the Nikon NSR-2005 I11 and I12 C/D Steppers. Our comprehensive refurbishment process ensures that each unit meets stringent quality standards, providing customers with reliable, high-performance equipment at a competitive price.
Why Choose Our Refurbished Equipment?
Quality Assurance: Each refurbished stepper undergoes rigorous testing and quality checks to ensure it operates at optimal performance levels. We adhere to industry standards, ensuring that our refurbished equipment performs as well as new.
Cost-Effectiveness: Our refurbished models offer significant savings compared to new equipment, making advanced lithography technology accessible for businesses of all sizes. This allows companies to invest in other critical areas of their operations.
Expert Support: Our team of experienced technicians is available to provide ongoing support, ensuring your equipment remains operational and efficient. We offer both technical support and operator training, empowering your team to utilize the equipment effectively.
Maintenance and Support Services
Maintaining the performance of the Nikon NSR-2005 series is crucial for consistent production quality. At JUNR, we offer tailored maintenance and support services, including:
1. Regular Calibration
Calibration of optical systems is essential to maintain imaging accuracy. Our expert technicians ensure that the systems are calibrated regularly to prevent performance degradation.
2. Scheduled Maintenance
Implementing a routine maintenance schedule helps identify and address potential issues before they disrupt production. Our maintenance packages are designed to suit your operational needs, ensuring minimal impact on production.
3. Comprehensive Support
We provide access to technical support and training programs to help your team maximize the capabilities of the equipment. Our customer service team is always available to address any concerns or questions you may have.
Conclusion
The Nikon NSR-2005 I11/I12 C/D Stepper stands as a benchmark in semiconductor manufacturing, combining advanced technology with high precision to meet the demands of modern applications. At JUNR, we are committed to providing expertly refurbished equipment, ensuring that your production line is equipped with the best tools available. For inquiries about our refurbished Nikon NSR-2005 models or any other semiconductor manufacturing needs, please contact us through our website at www.junr.com.cn/en/. Let us support your journey in achieving exceptional manufacturing outcomes with reliable, high-performance equipment, backed by our expertise and commitment to quality.
