Used Lithography Equipment : Strategic Solution for Cost-Effective Semiconductor Manufacturing

1. Introduction to Used Lithography Equipment

Lithography equipment is the cornerstone of semiconductor manufacturing, responsible for transferring intricate circuit patterns onto silicon wafers with nanometer-level precision. As the industry pushes toward smaller nodes and higher integration, the demand for high-performance lithography tools remains robust.

However, for many mature fabs, packaging houses, R&D labs, and specialty device manufacturers, the capital expenditure required for brand-new photolithography systems is not always justified. This has driven strong demand in the global market for used lithography equipment—an alternative that delivers both performance and value.

With proper refurbishment and testing, second-hand steppers and scanners can provide years of stable operation, making them a strategic choice for cost-conscious operators.

2. Benefits of Choosing Used Lithography Equipment

Investing in used lithography tools brings more than just cost savings. In fact, many semiconductor manufacturers are now actively incorporating legacy systems into their production lines for a variety of strategic reasons:

✔ Cost Efficiency

• Used tools typically cost 30%–70% less than new equipment.

• Enables fab expansion or pilot line setup without massive capital investment.

✔ Faster Lead Times

• Immediate availability from global inventories.

• Avoids the 6–12 month lead times associated with new tool purchases.

✔ Proven Reliability

• Legacy tools like Nikon NSR, Canon FPA, and ASML PAS series have extensive field performance data.

• Most tools have known behavior profiles, making process integration more predictable.

✔ Environmental Sustainability

• Reuse of equipment reduces e-waste and conserves energy used in new manufacturing.

• Aligned with global ESG (Environmental, Social, and Governance) goals.

3. Key Types of Lithography Equipment Available on the Secondary Market

The secondary lithography market offers a diverse range of equipment to meet the needs of different fabs. Tools vary in terms of light source, wafer size capability, resolution, and intended application (logic, memory, MEMS, power devices, etc.).

Common Categories:

Mainstream Used Models:

4. Factors to Consider Before Purchasing

Buying used lithography equipment is a strategic investment—but only when approached with diligence and technical due care. Here are the key parameters every buyer should evaluate before finalizing a purchase:

4.1 Technical Specifications

• Resolution & Overlay Accuracy: Ensure the tool meets your minimum lithographic requirements.

• Throughput: Match equipment throughput with your fab’s cycle time expectations.

• Wafer Compatibility: Confirm support for your specific wafer size and thickness.

4.2 Condition and Refurbishment Level

• Ask whether the equipment is as-is, tested, or fully refurbished.

• Request detailed refurbishment records, including replaced parts and testing data.

4.3 Infrastructure Compatibility

• Evaluate cleanroom space, utilities (power, nitrogen, CDA), and exhaust requirements.

• Check for alignment with existing track systems or automation interfaces.

4.4 Parts and Support Availability

• Ensure spare parts are accessible either through the vendor or third-party channels.

• Consider the availability of on-site service engineers and remote diagnostics.

4.5 Documentation and Transfer Procedures

• Complete manuals, software licenses, and CE/SEMATECH compliance should be verified.

• Cross-border shipping requires proper decontamination and crating.

5. JUNR’s Approach to Used Lithography Equipment

At JUNR, we specialize in sourcing, refurbishing, and supporting used lithography equipment for semiconductor manufacturers across Asia and beyond. Our technical team brings decades of experience in equipment inspection, maintenance, and calibration, ensuring that every tool we deliver is ready for production integration.

End-to-End Refurbishment Workflow

Customized Services Include:

• Track-to-Stepper matching: Integrate with existing coater/developer systems

• Recipe Migration & Process Transfer: Ensure seamless transition from old to new equipment

• Installation & Ramp-up Support: On-site setup, acceptance testing, and training

• Post-Sale Service: Regular PM, fault diagnostics, and upgrade consultation

6. Why JUNR Is Your Trusted Partner in Used Lithography

Choosing a supplier for used semiconductor equipment is not merely about price—it’s about reliability, expertise, and long-term partnership. At JUNR, we are committed to delivering not just machines, but productivity, support, and confidence.

✅ Our Key Advantages:

• Professional Equipment Team

  • Engineers with deep knowledge of Nikon, Canon, and ASML systems

  • Experience with hundreds of global installations

• Comprehensive Inventory

  • Sourcing capabilities for hard-to-find or discontinued models

  • Ongoing access to spare parts and peripheral components

• Transparent Communication

  • Detailed technical reports, refurbishment records, and pre-sale inspections

  • Honest assessment of equipment condition and expected performance

• Total Lifecycle Support

  • From deinstallation and relocation to reinstallation and production monitoring

Contact Us

If you’re considering used lithography equipment for your production line, R&D facility, or pilot fab, our team is ready to help. From selection to installation, JUNR ensures a seamless experience with unmatched technical depth.

Office Address:
Room 2202–2205, North Tower, Galaxy City, No. 311 Guangyi Road, Liangxi District, Wuxi, Jiangsu, China

Phone: +86 510 8269 8985
Fax: +86 510 8269 0116
Postal Code: 214000

For Equipment, Parts & Service Inquiries:
Contact Person: Mr. Shuyong Shan
Mobile:+86 13506193015
Email: shansy@junr.com.cn