1. Introduction
The Advantest UF200 series — including the UF200, UF200A, and UF200SA models — has earned a reputation for reliability, accuracy, and versatility in wafer-level probing applications. These semi-automated probers are widely used in production and R&D environments across the semiconductor industry. As wafer sizes and testing demands continue to evolve, many facilities turn to the secondary equipment market for cost-effective solutions.
Used UF200-series probers offer significant savings and short lead times compared to new equipment. However, purchasing one without a thorough evaluation may lead to operational issues or integration delays. This article outlines the top five critical factors that any buyer should examine before acquiring a used UF200, UF200A, or UF200SA prober.
2. Item #1: Overall Mechanical Condition
Mechanical integrity is the foundation of any prober’s long-term performance. The UF200 series utilizes high-precision linear stages, Z-axis motion control, and probe arm mechanisms — all of which are subject to wear and degradation over time.
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● X-Y Stage Movement:
Move the wafer chuck through its full range and observe for jitter, vibration, or backlash. Uneven or noisy motion may signal worn motors or damaged linear guides. -
● Z-Axis Performance:
The vertical movement should be smooth and repeatable. Look for signs of play or mechanical noise during up/down strokes. -
● Probe Arm Condition:
Inspect the touchdown mechanism for responsiveness and positioning accuracy.
3. Item #2: Vision and Alignment Systems
Accurate wafer alignment is critical to achieving high probe yield and minimizing test errors. The UF200 series uses optical systems for die recognition and alignment, and each model may include different vision configurations.
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● Microscope Condition:
Check for image clarity, lighting uniformity, and camera responsiveness. -
● Laser/Optical Sensors:
Ensure the auto-alignment system functions correctly. Misalignment or drift over time can cause consistent probe miscontacts. -
● Software Alignment Routines:
Run automatic alignment routines to test repeatability and calibration accuracy. -
● UF200SA Specifics:
The UF200SA supports thermal chuck operation, where precise alignment under thermal expansion is crucial. Verify that the system compensates for this correctly.
4. Item #3: Software and Controller Compatibility
The software environment plays a vital role in the seamless operation of a prober. Used UF200 systems often come with outdated or proprietary controller software, which may pose risks in integration and long-term support.
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● Operating System Compatibility:
Many older UF200s run on Windows XP or Windows 2000. Ensure compatibility with your network and IT policy. -
● Prober Control Software Version:
Record the exact software version and confirm it supports your required test flow. -
● Automation Interfaces:
If you're integrating with test handlers or ATE systems, check support for SEMI standards like SECS/GEM. -
● License Status:
Some control software may require dongles or licenses that are non-transferrable. Validate their availability and legitimacy.
5. Item #4: Chuck, TCU, and Thermal System
The wafer chuck is central to the prober’s functionality. In the UF200SA, which includes thermal capability, the chuck system becomes even more critical. Temperature stability, vacuum integrity, and chuck planarity directly impact test accuracy and repeatability.
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● Vacuum Chuck Surface:
Ensure that the wafer chuck holds wafers firmly without leaks. Check for scratches, corrosion, or deformation that may affect wafer flatness. -
● Temperature Control Unit (TCU):
For UF200SA systems, verify:-
1. TCU power-up self-test results
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2. Temperature rise and fall times
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3. Accuracy of thermal sensors across setpoints (e.g., -40°C to +125°C)
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● Planarity and Z-height Calibration:
Especially critical in multi-site testing. Run auto-planarization routines and verify with test die patterns. -
● Thermal Cycling Integrity:
Confirm that thermal cycling does not cause mechanical drift or misalignment in repeated use.
6. Item #5: Maintenance History and Vendor Reliability
Even a high-end used prober can become a liability if its history is unclear or if the vendor lacks technical expertise. Maintenance records are essential for understanding how the system was operated and whether it has received proper care.
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● Usage Log or History Report:
Total operating hours, error logs, environmental conditions (e.g., cleanroom class). -
● Service and Calibration Records:
Look for documented service interventions, part replacements, calibration certificates. -
● Refurbishment Details:
Was the machine fully disassembled and rebuilt? Were consumables (bearings, belts, sensors) replaced? -
● Warranty or After-Sales Support:
A reputable vendor will offer a limited warranty, installation support, and optional service contracts.
7. Conclusion
The Advantest UF200, UF200A, and UF200SA probers remain viable and valuable tools in the semiconductor testing ecosystem. Their robustness, automation capabilities, and adaptability to a wide range of wafer probing needs make them highly sought after in the used equipment market.
However, the decision to purchase a used UF200-series prober should be informed by careful inspection and objective criteria. From mechanical performance and software compatibility to thermal control and vendor credibility, each factor plays a vital role in long-term system reliability.
By following the five key checks outlined in this article, you can make a confident and cost-effective investment — ensuring that your used prober delivers both performance and peace of mind.
Looking for tested and verified UF200-series probers?
Contact JunR today for detailed specifications, demo scheduling, and trusted after-sales service.
