I. Introduction
A probe station is a precision testing platform used to perform electrical measurements on semiconductor wafers at the die level. These stations are critical in wafer-level testing before final packaging and are widely used in foundries, IC test labs, R&D departments, and failure analysis (FA) facilities.
As semiconductor manufacturing continues to demand higher accuracy and cost efficiency, many organizations are choosing used probe stations as a practical solution. Compared to brand-new systems, used probe stations offer similar functionality at a significantly lower capital investment — especially when sourced from trusted suppliers and properly refurbished.
II. What Is a Probe Station?
A probe station serves as the physical interface between a semiconductor wafer and measurement instruments. Its primary function is to position micromanipulated electrical probes onto precise locations on a wafer to evaluate electrical characteristics of each die.
III. Commonly Used Probe Station Models in Semiconductor Testing
Selecting the right probe station is a critical step in wafer-level electrical testing. Various models from globally recognized manufacturers serve different applications — from advanced RF testing to basic parametric measurements. Below is an overview of some widely adopted probe station models, commonly found in foundries, R&D labs, and IC testing facilities.
| Model | Manufacturer | Wafer Size | Key Features | Typical Applications |
|---|---|---|---|---|
| Cascade Summit 12000 | FormFactor (Cascade) | 6" / 8" / 12" | High-stability platform, thermal chuck options, semi- or full automation | RF/mmWave, failure analysis, reliability |
| Cascade M150 / M300 | FormFactor (Cascade) | 6" / 8" | Manual operation, microscope integration, flexible arm layout | Device characterization, education, FA |
| TEL P8 / P12XL | Tokyo Electron (TEL) | 8" / 12" | Fully automated, high-throughput wafer probing, advanced chuck options | Wafer sort (CP test), inline production |
| Electroglas 4080 / 4090 | Electroglas | 6" / 8" | Semi-automatic with integrated prober control software | Engineering test, legacy device testing |
| MPI TS200-SE / TS300-SE | MPI Corporation | 8" / 12" | High-resolution probing, thermal and RF upgrade options | Mixed-signal, RF, analog characterization |
| Accretech UF200 / UF3000 | Tokyo Seimitsu | 8" / 12" | Production-grade probing, auto wafer handling, ATE integration | High-volume wafer sort |
| Signatone S-1160 | Signatone | 6" | Compact, entry-level manual prober, modular platform | Research, education, low-frequency testing |
| Wentworth MP2000 | Wentworth Labs | 6" / 8" | High-precision stage movement, dark box compatibility | Failure analysis, probe card validation |
Selection Notes:
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Cascade and MPI platforms are popular in RF and high-precision environments
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TEL and Accretech dominate in production-scale CP test floors
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Electroglas systems are cost-effective choices for mid-volume testing and are widely available in the secondary market
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Signatone and Wentworth models suit academic or entry-level applications
IV. Factors That Affect the Price of Used Probe Stations
The price of a used probe station depends on a variety of technical, operational, and commercial factors. Understanding these variables is critical to making an informed purchasing decision.
1. Brand and Model
Some manufacturers have stronger market presence and resale value. For instance, Cascade Microtech, MPI, Electroglas, and TEL (Tokyo Electron) are recognized for their robust engineering and precision.
2. System Type and Feature Set
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Manual systems are generally the least expensive
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Semi-automatic systems cost more due to motion control and automation
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Fully automatic systems command higher prices but offer unmatched efficiency
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Add-on features such as thermal chuck systems, RF probe integration, and dark box enclosures increase overall value
3. Refurbishment and Condition
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As-is systems are cheaper but riskier
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Partially refurbished systems have some verified components
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Fully refurbished systems are cleaned, calibrated, and tested to meet OEM-level standards, and often come with limited warranty
4. Accessories and Inclusions
Pricing is affected by whether key components are included, such as:
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High-resolution optical microscopes
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Motorized or manual XYZ micropositioners
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Anti-vibration tables
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Probe arms or RF manipulators
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PC interface software for automation
5. Age and Usage History
Older systems with high usage cycles may be more affordable but could require additional maintenance. Lightly used systems from low-volume labs often retain better mechanical stability and optical quality.
V. Benefits of Buying Used Probe Stations
Purchasing a used probe station can be a strategic decision for semiconductor fabs, test labs, or R&D teams aiming to balance technical capability with cost-efficiency. When sourced from a reliable supplier and thoroughly inspected or refurbished, used systems can deliver performance comparable to new equipment.
Key Benefits:
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1. Significant Cost Reduction
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Used systems typically offer 40–70% savings over new units.
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Enables acquisition of higher-spec models within limited budgets.
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2. Shorter Lead Times
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New systems may require months of lead time.
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Used equipment, especially if in stock, can often be delivered and deployed within weeks.
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3. Customizable Configuration
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Used probe stations can be upgraded or modified (e.g., adding thermal chuck, RF probes).
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Allows tailoring of functionality to exact application needs.
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4. Sustainability and Resource Efficiency
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Extending the life of existing equipment contributes to greener semiconductor manufacturing.
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Reduces e-waste and capital resource consumption.
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5. Support for Legacy Processes
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Certain mature nodes or specialty processes (MEMS, power semiconductors) require equipment that may no longer be available new.
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Used systems can fill this gap.
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VI. What to Look for When Buying a Used Probe Station
Choosing the right used probe station requires technical due diligence to ensure reliability, compatibility, and long-term usability. Here are key evaluation criteria:
✅ Mechanical and Optical Integrity
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Check for smooth chuck motion and stage planarity
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Inspect microscope optics for scratches, resolution, and focus control
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Evaluate manipulators and XYZ stages for repeatability and backlash
✅ System Configuration
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Confirm wafer size support (e.g., 4", 6", 8", 12")
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Ensure chuck type matches application (vacuum, thermal, triaxial)
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Validate probe arm compatibility with your measurement instruments
✅ Cleanroom Compatibility
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Determine whether the system is ISO-certified or compatible with cleanroom operation
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Review filtration and enclosure options (for dark box or EMI-sensitive work)
✅ Post-Sale Support
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Does the supplier provide documentation, software, manuals, or training?
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Is there warranty coverage or on-site installation support available?
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Are spare parts and consumables still available for the model?
VII. JUNR’s Expertise in Used Probe Stations
At Wuxi Junr Technology Co., Ltd., we understand the unique needs of customers seeking dependable, cost-effective solutions in wafer-level testing. Our experience spans more than 15 years in the semiconductor equipment field — including sourcing, refurbishing, and supporting advanced probe stations.
What We Offer:
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A broad selection of in-stock used probe stations from top brands (Cascade, TEL, MPI, Electroglas, etc.)
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Refurbishment services including mechanical recalibration, optical cleaning, and electrical testing
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On-site support for installation, alignment, and training
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Customization (e.g., adding thermal chuck, upgrading microscope, replacing manipulators)
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Global sourcing network, ensuring high availability and flexible supply chains
Whether you're testing high-frequency RF ICs, characterizing new power devices, or expanding your CP test line, JUNR can help you identify the most suitable used equipment for your goals.
VIII. Contact Us for Availability and Pricing
Due to the diversity of configurations, rapid inventory changes, and application-specific needs, we do not publish fixed pricing for used probe stations.
Instead, we encourage interested customers to:
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Contact our sales and technical team directly
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Share your test requirements, wafer size, and desired station type
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Request current availability, photos, system specs, and a tailored quotation





