The Applied Materials Centura 5200 platform remains one of the most widely used semiconductor tools in the world—especially for oxide, nitride, and low-k PECVD processes. Even though modern fabs continue migrating to newer 5200/5300/Producer platforms, the original Centura 5200 still offers exceptional stability and cost-performance, making refurbished systems and high-quality spare parts in very high demand.
For fabs operating at 200 mm and specialty processes (MEMS, power devices, automotive, opto-electronics), keeping the Centura 5200 “healthy” is critical.
1. Overview of the Centura 5200 Platform
The Centura 5200 is a multi-chamber, high-vacuum, modular cluster tool widely used for:
• PECVD oxide
• PECVD nitride
• Low-k dielectric
• TEOS/O3 oxide
• Polymer deposition
• Thick films for MEMS
• Barrier and passivation layers
Key advantages of the platform:
• Highly modular chamber configuration
• Stable process repeatability
• Compatible with older recipes still used in specialty fabs
• Easily refurbished and maintained
• Low cost vs. modern 300 mm systems
Because of high uptime and low ownership cost, the 5200 remains a favorite for fabs requiring a stable, predictable dielectric process tool.
2. Why Refurbish a Centura 5200 Instead of Buying New?
Cost Advantage
A fully refurbished Centura 5200 typically costs 20–30% of a new tool.
Parts Availability
Due to large global installations, spare parts are:
• Accessible
• Affordable
• Readily interchangeable
• Supported by third-party suppliers
Process Stability
Older power devices, automotive chips, IGBT, analog, and MEMS often require legacy process windows that newer tools cannot replicate easily.
Fabs Prefer to Extend 5200 Lifetime
With proper maintenance, many 5200 platforms run over 25 years.
3. What Does “Refurbishing a Centura 5200” Include?
Refurbishment is not simply cleaning the machine—it is a full mechanical, electrical, and process-level overhaul.
3.1 Full System Overhaul Scope
✔ 1. Platform Base Refurbishment
• Frame cleaning, rust removal
• Cable and harness replacement
• Pneumatic rebuild
• Valve upgrades
✔ 2. Chamber Rebuild
A full chamber rebuild includes:
• New O-rings
• New seals
• Heater module replacement
• RF match tune-up
• Gas showerhead cleaning/replacement
• ESC inspection or replacement
• Quartz parts replacement
• Electrodes conditioning
Proper chamber rebuilding is the most critical step for process stability.
3.2 Robot & Transfer Module Refurbishment
The transfer robot is the “heart” of the Centura:
• Robot servo motor rebuild
• Belt / bearing replacement
• Robot re-zeroing
• Pre-aligner rebuild
• Loadlock pump-down calibration
Robotic issues cause the majority of unplanned downtime, so refurb quality here is extremely important.
3.3 Pumping & Vacuum System Refurbishing
• Dry pump overhaul
• Turbo pump rebuild
• Gate valve replacement
• Pressure gauge calibration
• Vacuum O-ring replacement
Stable vacuum integrity directly impacts particle performance and process repeatability.
3.4 Electrical & Control System Refurbishing
• PC/controller upgrade (if required)
• I/O board replacement
• RF generator testing and calibration
• Temperature controller replacement
• Power distribution checks
Older boards frequently fail, so refurbishers typically stock tested spares.
3.5 Software Reload & Factory Calibration
After mechanical restoration:
• System software reload
• Cross-chamber matching
• Temperature calibration
• RF matching calibration
• End-point and gas flow tuning
This restores factory-level performance.
4. Key Centura 5200 Spare Parts List
A high-quality refurbisher or fab must maintain inventory of the following consumable and critical parts.
4.1 Process Chamber Parts
| Part Category | Examples |
|---|---|
| Quartz & ceramics | Showerhead, liner, insulation ring |
| ESC (Electrostatic Chuck) | Cooling channels, backside pressure system |
| Heater parts | Heater coil, thermocouple, baseplate |
| O-rings & seals | Viton/FFKM chamber seals |
| Gas delivery components | MFCs, regulators, showerhead plates |
4.2 Vacuum & Pumping Parts
• Turbo pumps
• Dry pumps
• Gate valves
• Throttle valves
• Pressure gauges (MKS, VAT, Edwards)
4.3 RF System Parts
• RF generator (ENI / AMAT units)
• RF matching network
• RF cables
• Impedance components
4.4 Electrical System Components
• I/O boards
• Power supply modules
• Controller boards
• Interlock modules
• Temperature controllers
4.5 Robot & Transfer Parts
• Robot arm assemblies
• Servo motors
• Bearings
• Belts
• Pre-aligner sensors
4.6 Loadlock & Atmospheric Parts
• Loadlock slit valves
• Lift pins
• Pin lifter assemblies
• Sensors
• Pumps and purge valves
5. Common Failure Modes in Centura 5200
Identifying weak points helps optimize PM schedules.
5.1 Chamber Particle Issues
Cause: deteriorated quartz, old O-rings, pump contamination
Prevention: frequent chamber PM and replacing aged parts
5.2 RF Instability / Arcing
Cause: aging match network, worn electrodes
Prevention: yearly match unit calibration
5.3 Temperature Drift
Cause: heater aging or sensor drift
Prevention: replacing heaters every major PM cycle
5.4 Robot Positioning Errors
Cause: belt stretch, servo motor wear
Prevention: robot recalibration every 6–12 months
5.5 Loadlock Pump Slow
Cause: old dry pump, gate valve leakage
Prevention: periodic pump rebuilds
6. Best Practices When Purchasing Refurbished 5200 Parts
✔ Choose suppliers who provide test reports
Especially for:
• RF generators
• I/O boards
• MFCs
• Heaters
• ESCs
✔ Confirm compatibility and revision levels
Different chamber types (DxZ, DxZxT, HDP, etc.) have different part versions.
✔ Buy from suppliers with actual hands-on experience
The Centura system is complex—incorrect parts create severe instability.
✔ Request warranty (3–12 months)
Good suppliers offer part warranty and system support.
7. How to Evaluate a Refurbished Centura 5200 Before Purchase
Checklist for fabs:
• Chamber leak-up test (< 0.4 mTorr/min)
• Robot calibration report
• RF power stability test
• Heater uniformity test
• Vacuum pump-down curve
• Software licensing verification
• Chamber-origin record (no scrap tools)
A high-quality refurbisher will provide complete documentation.
8. Why Many Fabs Choose Third-Party 5200 Parts Suppliers
Third-party suppliers—when professional—offer:
• Faster delivery
• More flexible pricing
• Refurbished and new parts options
• Engineering support for troubleshooting
• Ability to supply obsolete or hard-to-find parts
This is especially valuable for fabs running older but stable process nodes.
9. Conclusion
The Applied Materials Centura 5200 remains one of the most valuable and cost-effective PECVD platforms in 200 mm fabs. With proper refurbishing, calibration, and reliable spare parts, the tool can deliver:
• High uptime
• Low particle performance
• Stable deposition uniformity
• Excellent return on investment
For fabs seeking refurbished Centura 5200 systems, parts, or chamber rebuild services, partnering with a knowledgeable semiconductor equipment supplier is essential.
If you need refurbished chambers, tested components, robot parts, vacuum systems, or full-tool overhaul, our engineering team can provide professional guidance and high-reliability parts.
