JUNR Supply laser tube renovation and Calibration service
HP5517A/HP5517B/HP5517C/HP5517D and ZYGO 7701/7702
Exposure system
The demand to shrink the minimum feature size for large integration semiconductor circuits has driven the improvement in performance of optical exposure tools. Exposure systems consist of a light source, a filter, illumination optics, a mask, projection optics, an alignment system and a wafer stage.
JUNR supply Light source renovation and calibration
JUNR renovation is not to inflate the original interferometer, we are arrange to replace old laser tube with the new to correct the original circuit. We provide a one-year warranty.
1. Mercury Lamps
The source of radiation for photolithography has traditionally been a Hg or Hg-rare gas discharge lamp. The emission spectra from a high pressure mercury lamp is shown in Fig.1 . The equilibrium pressure of Hg and the rare gas determine the spectral distribution of the light output. This output is high in the near-UV region (350-450 nm) and in the mid-UV region (300-350 nm), and lower in the DUV region (200-300 nm).
2. JUNR laser tube replacement and calibration flow :
- Scanner Equipment Alignment Laser Head
- Laser beam analysis
3. HP5517A/HP5517B/HP5517C/HP5517D and ZYGO 7701/7702 renovation calibration specification :
HP HP5517A sepcification:
Type: Helium-Neon, Continuous, Two-Frequency
Max Power Output: 1mw
Min Power Output: 180uw
Beam Diameter: 6mm
Reference frequency : 1.5-2.0 MHZ
HP HP5517B sepcification:
Type: Helium-Neon, Continuous, Two-Frequency
Max Power Output: 1mw
Min Power Output: 180uw
Beam Diameter: 3mm、6mm 、9mm
Reference frequency : 1.9-2.4 MHZ
HP HP5517C sepcification:
Type: Helium-Neon, Continuous, Two-Frequency
Max Power Output: 1mw
Min Power Output: 180uw
Beam Diameter: 6mm
Reference frequency :2.4 -3.0 MHZHP HP5517D sepcification:
Type: Helium-Neon, Continuous, Two-Frequency
Max Power Output: 1mw
Min Power Output: 180uw
Beam Diameter: 6mm 、9mm
Reference frequency :3.4 -4.0 MHZ
ZYGO 7701 AND 7702 Specification :
Type: Helium-Neon, Continuous, Two-Frequency
Max Power Output: 1mw
Min Power Output: 400uw
Beam Diameter: 6mm (25m)
Reference Frequency: 20 MHZ ± 1600HZ
