TEL MARK-V MARKVZ MARK7/8 DNS 设备销售及技术服务
君睿科技是专业的Track服务商，我们为客户提供TEL MARKV-8 DNS60A-90B的维修、改造（6改4,6改8）以及安装调试等专业服务，为客户提供各种配件和耗材，提供胶泵及TEL MARKV 等机台的马达和驱动器等，欢迎您的咨询选购。
1. TEL MARK8 System设备参数如下：
Configured for 200 mm
wafers
Dual Coat and Dual Develop stations
Carrier Station (C/S) 1x4 side load
M12 Process Frame with Main Arm
Environmental Enclosure with ULPA Filtration
2. MARKVZ 设备参数如下
TEL Clean Track Act 8
single block 200 mm
photo resist wafer track configured with two
coaters and two developers. The TEL Clean
Track Act 8 is the industry standard 200mm
coater/developer, providing airborne
chemical filtration, innovative chemical
dispense systems, and excellent thermal
uniformity of PEB hotplates allowing for
TEL MARK-V MARKVZ MARK7/8 功能对比
|
Mark Vz |
Mark7/Mark8 |
|
|
Wafer size (mm) |
75,100,150 |
100,150,200 |
|
Availability |
Certified used |
Certified used |
|
Throughput (wph) |
Inline:60 |
Inline: 90 |
|
Process |
i-line |
i-line, KrF |
|
Substrates |
Si, GaAs, GaN, GaP,SiC |
Si, GaAs, GaN, GaP,SiC |
|
Additional features |
Transfer robot |
Enclosed system |
