TEL MARK-V MARKVZ MARK 7/8 DNS 设备销售及技术服务

君睿科技是专业的Track服务商，我们为客户提供TELMARKV-8DNS60A-90B的维修、改造(6改4，6改8)以及安装调试等专业服务，为客户提供各种配件和耗材，提供胶泵及TELMARKV等机台的马达和驱动器等，欢迎您的咨询选购。

• TEL MARK8 System Includes:
• ● Configured for 200 mm wafers
• ● Dual Coat and Dual Develop stations
• ● Carrier Station(C/S)1x4 side load
• ● M12 Process Frame with Main Arm
• ● Environmental Enclosure with ULPA Filtration

• ● TEL Clean Track Act 8 single block 200 mm photo resistwafer track confiqured with two coaters and two developers.
• ● The TEL Clean Track Act 8 is the industry standard
• 200mm coater/developer,
• providing airbornechemical filtration,
• innovative chemicaldispense systems,
• and excellent thermaluniformity of PEB hotplates allowing for.

	Mark Vz	Mark7/Mark8
Wafer size (mm)	75,100,150	100,150,200
Availability	Certified used	Certified used
Throughput (wph)	Inline:60	Inline: 90
Process	i-line	i-line, KrF
Substrates	Si, GaAs, GaN, GaP,SiC Glass, Sapphire, AlTiC, LN, LT	Si, GaAs, GaN, GaP,SiC Glass, Sapphire, AlTiC, LN, LT
Additional features	Transfer robot	Enclosed system