C1 PARTS section 1 -- Gas system
| 1 | 17-00030-00 | Enclosure, Gas Box Novellus |
| 2 | 03-00019-00 | PCB Assy, Gas panel Novellus |
| 3 | 10-00031-01 | Tube assy, Vacuum Manifold Novellus |
| 4 | 10-00074-00 | Tube Assy, Manifold A Novellus |
| 5 | 10-00032-02 | Tube assy , Manifold B Novellus |
| 6 | 10-00033-00 | Tube assy, N2 Purge Novellus |
| 7 | 10-00245-00 | Tube Assy , Inlet / Purge "A" Novellus |
| 8 | 10-00035-01 | Tube Assy , "B" Gas supply Novellus |
| 9 | 10-00036-00 | Tube Assy , Manifold Extention Novellus |
| 10 | 10-00346-00 | Tube Assy , Inlet "B" Novellus |
| 11 | 10-00038-00 | Tube Assy , Purge Manifold Novellus |
| 12 | 10-00073-00 | Tube Assy , "A" Gas supply Novellus |
| 13 | 22-00005-06 | MFC, 5 slm , N2 Novellus |
| 14 | 22-00005-09 | MFC 10 slm, N2 Novellus |
| 15 | 22-00006-00 | Filter , Wafergard, LP-Mini ,, 1/4 inch VCR Millipore WG2FI1RR2 |
| 22 | 17-00052-00 | Bracket ,Tube Retainer Novellus |
| 23 | 17-00053-00 | Plate , Tube Regainer Novellus |
| 24 | 17-00054-00 | Bracket , Tube Retainer Novellus |
| 27 | 22-00612-00 | Valve , Pneumatic ,NC , 1/4 ,VCR Nupro 6LV-DAFR4-P-C |
| 28 | 22-00150-00 | Tee , 1/4 VCR Cajon SS-4-VCR-T |
| 31 | 22-00252-00 | Fitting ,Elbow 1/4 Swagelok swagelok SS-400-2-4ST |
| 32 | 22-00417-00 | Gasket/ Retainer , 1/4 inch VCR , Ni Cajon NI-4-VCR-2-GR-VS |
| 33 | 22-00005-04 | MFC , 2 slm , N2 Novellus |
| 53 | 10-00249-00 | Tube assy , Female Coupling Novellus |
| 57 | 22-00015-00 | Plug , VCR 1/4 INCH Cajon SS-4-VCR-P |
| 60 | 22-00357-00 | Coupling , Panel Mt., 1/8 inch Flow , 10-32 , Shutoff Colder MCD-18-1032 |
| 61 | 22-00182-00 | Insert , Straight , 1/8 inch Flow , 1/4 inch ,Shutoff Colder MCD 20-04 |
| 65 | 22-00655-00 | Valve , Diaphram, NO ,FVCR Nupro 6LV-DAFR4-PO |
| 66 | 22-00005-11 | MFC , 2 slm , NH3 Novellus |
| 67 | 22-00005-10 | MFC , 1 slm , N2 Novellus |
| 68 | 27-00119-00 | Interlock Assy , Gas panel Novellus |
| 74 | 22-00014-01 | Nut , Female |
