2.6 Loadlock Foreline ( w/T -Valve ) - 02-00284-00
1 19-00249-00 valve,Angle, 2 inch w/limit switch /cable novellus 2 15-00286-00 Bracket , vacuum system support novellus 3 15-00289-00 Spacer , plate Upper Novellus 4 15-00290-00 Spacer , plate lower Novellus 5 16-00155-00 Duct , vacuum , 2 inch novellus 6 22-00653-00 Adapter , KF40 /KF50 HPS 31-3716 7 20-00207-00 U-Bolt , 2 inch line Novellus 8 22-00015-00 Plug , VCR , 1/4 INCH Cajon SS-4-VCR-P 9 22-00244-00 Elbow , Male , 1/8 inch MPT - 1/8 inch tube SMC KQL01-345 11 60-00015-00 Ring , Centering , O-ring , KF50 HPS 31-2606 12 60-00016-00 Clamp , Aluminum , KF50 , HPS 31-2906 13 60-00140-01 Valve , vacuum soft-start , KF40 VAT 60032-KA98 22 22-00417-00 Gasket/Retainer , 1/4 inch VCR , Ni Cajon NI-4-VCR-2-GR-VS 23 27-00148-01 Valve, Throttle, 2inch , KF50 MKS 253A-12457 24 60-00040-00 Clamp, Aluminum , KF40 HPS 31-2905 25 60-00039-00 Ring , Centering , O-ring , KF40 HPS 31-2605 26 60-00177-00 Adapter , NW40 TO 1 , 1/2 INCH ASA novellus
