2.7 Loadlock Foreline -02-00006-00
| 1 | 60-00002-00 | Valve, Hi Vac , 2inch , KF50 HPS 99-3191 |
| 2 | 15-00289-00 | Spacer , Plate Upper Novellus |
| 4 | 15-00290-00 | Spacer, Plate Lower Novellus |
| 5 | 16-00057-01 | Duct , Vacuum , 2 inch Novellus |
| 6 | 16-00074-00 | Manifold , 2 inch line Novellus |
| 7 | 20-00207-00 | U-bolt , 2 inch Line Novellus |
| 8 | 22-00015-00 | Elbow , Male , 1/8 inch -1/8 tube SMC KQL01-34S |
| 9 | 22-00015-00 | Plug , VCR , 1/4 INCH Cajon SS-4-VCR-P |
| 11 | 60-00015-00 | Ring , Centering , O-ring , KF50 HPS 31-2606 |
| 12 | 60-00016-00 | Clamp , Aluminum , KF50 HPS 31-2906 |
| 13 | 60-00140-01 | Valve , vacuum soft-start , KF40 VAT 60032-KA98 |
| 22 | 22-00417-00 | Gasket / Retainer , 1/4 inch VCR , Ni Cajon NI-4-VCR-2-GR-VS |
| 101 | 10-00090-00 | Valve Assy , WTM Pumpout Novellus |
| 102 | 22-00241-00 | Tee , Union , 1/8 inch tube SMC KQT01-00 |
| 103 | 22-00093-00 | Fitting , 9/16 -18 ST * 1/4 inch VCR Cajon SS-4-VCR-1-00032 |
| 104 | 22-00053-00 | O-ring , 0.676 inch * 0.070 inch , victor parker 2-017-v747-70 |
| 105 | 22-00155-00 | O-ring , 2.609 inch * 0.139 inch , buna parker 2-231-N741-70 |
