2.9 Reactor Foreline standard
| 1 | 10-00142-01 | Tube assy, Divert A , 150mm Novellus |
| 1 | 10-00397-00 | Tube assy, Divert A/B , 150mm (NG) Novellus |
| 1 | 10-00144-01 | Tube assy , Divert A , 200MM Novellus |
| 2 | 15-00287-00 | spacer ,plate upper novellus |
| 3 | 15-00288-00 | spacer , plate lower novellus |
| 4 | 15-00416-00 | Flange, spacing ring , 4 inch novellus |
| 5 | 16-00037-02 | Mainifold , vacuum 4 inch Novellus |
| 6 | 20-00208-00 | washer , flat , 5/16 *5/8 inch , SS common |
| 7 | 22-00209-00 | screw , SKHd , M8*30 , Blk O* common |
| 8 | 20-00210-00 | screw, SKHD , M8*90 , Blk O* common |
| 9 | 21-00354-00 | washer , spring lock , 18-8 common |
| 10 | 22-00245-00 | Elbow , 1/8 inch MPT * 1/4 tube SMC KQL07-34S |
| 10 | 22-00355-00 | Tee, 1/8 inch MPT * 1/4 tube (200 mm ) SMC KQY07-34S |
| 11 | 60-00001-00 | Valve , Throttle , vacuum control tylan MDVX-100B |
| 12 | 60-00003-00 | Valbe , Gate ,Hi vac , 24VDC , Actuator A3 VAT14040-PE34-0003 |
| 13 | 60-00180-00 | Vacuum transducer , KF25 Flange Teledyne 55267 |
| 14 | 60-00018-00 | Clamp , aluminum , KF25 HPS 31-2903 |
| 15 | 60-00019-00 | Ring , Centering , O-ring , KF25 HPS 31-2603 |
| 16 | 60-00026-00 | Ring , Centering , O-ring , NW100 HPS 76-0510 |
| 17 | 15-00600-00 | Stud , valve novellus |
