3.1 Upper Gas distribution
| 1 | 17-00236-00 | Housing, Gas vent A/B Novellus |
| 2 | 34-00056-00 | Switch, Interlock MicroSwitch 22AC2 |
| 3 | 15-00332-00 | Bracket , Interlock Switch Novellus |
| 4 | 22-00434-00 | O-ring , 0.239inch * 0.070 , Buna parker 2-010-N741-70 |
| 5 | 15-00727-00 | Bracket , A/B GAS Line Novellus |
| 6 | 15-00726-00 | Clamp , A/B Gas line Novellus |
| 7 | 15-11606-00 | Insulator , Gas Dist , Ceramic Novellus |
| 8 | 22-00612-00 | valve , Pneumatic , NC , 1/4 , VCR Nupro 6LV-DAFR4-P-C |
| 9 | 22-00199-00 | Elbow , 90 degree, 3/8 inch Novellus |
| 10 | 10-00079-00 | Tube Assy , B-Gas , Upr , VCO 150MM Novellus |
| 10 | 10-00046-00 | Tube Assy , B-Gas , Upr , VCR 150MM Novellus |
| 10 | 10-00101-00 | Tuve Assy, B-Gas,, Upr , VCO 200MM Novellus |
| 10 | 10-00130-00 | Tube Assy , B-Gas , Upr ,VCR 200MM Novellus |
| 11 | 10-00080-00 | Tube Assy , A-Gas , Upr , VCO 150MM Novellus |
| 11 | 10-00045-00 | Tube Assy , A-Gas , Upr , VCR 150MM Novellus |
| 11 | 10-00102-00 | Tubee Assy , A-Gas , Upr , VCO 200 Novellus |
| 11 | 10-00129-00 | Tube Assy , A-Gas , Upr, VCR 200MM Novellus |
| 12 | 22-00244-00 | Elbow , 1/8inch MPT * 1/8 INCH Tube SMC kQL01-345 |
| 13 | 22-00417-00 | Gasket / Retainer , 1/4 inch VCR , Ni Cajon NI-4-VCR-2-GR-VS |
| 14 | 22-00006-00 | Filter , Wafergard, LP-Mini , 1/4 inch VCR Milliporte WG2FT1RR2 |
| 15 | 19-00299-00 | Manifold , Dual Injection , Heated Novellus |
| 16 | 10-00082-00 | Tube assy , A-Gas , Lwr , VCO 150MM Novellus |
| 16 | 10-00085-01 | Tube assy , A-Gas , Lwr , VCR 150MM Novellus |
| 16 | 10-00395-01 | Tube Assy , A-Gas , Lwr ,VCR 150MM-NG Novellus |
| 16 | 10-00097-00 | Tube assy , A-Gas , Lwr , VCO 200MM Novellus |
| 16 | 10-00131-00 | Tube Assy , A-Gas , Lwr , VCR , 200MM nOVEELLUS |
| 17 | 10-00082-02 | Tube Assy , B-Gas , Lwr , VCO 150MM Novellus |
| 17 | 10-00085-02 | Tube Assy , B-Gas , Lwr , VCR 150MM Noveellus |
| 17 | 10-00396-01 | Tube Assy , B-Gas , Lwr , VCO 150MM-NG Novellus |
| 17 | 10-00396-02 | Tube Assy , B-Gas , Lwr , VCR 150MM-NG , Novellus |
| 17 | 10-00096-00 | Tube assy , B-Gas , Lwr , VCO 200MM Novellus |
| 17 | 10-00128-00 | Tube Assy , B-Gas , Lwr , VCR 200MM Novellus |
