3.2 Gas Dispersion / Showerheads
| 1 | 22-00179-00 | Elbow, Union, 3/8 inch O-seal Key Hi Vac 10853-1 |
| 2 | 22-00345-00 | O-ring , 0.362inch *0.170inch , Viton parker 2-110 |
| 3 | 22-00342-00 | Nut , 3/8inch O-seal , Ultra Torr Cajon SS-6-UTN |
| 4 | 22-00343-00 | Sleeve , 3/8 inch O-seal , Ultra Torr Cajon 22-6-UTS |
| 5 | 22-00344-00 | O-ring , 0.364inch * 0070 inch , viton parker VT-70R-012 |
| 6 | 15-00685-00 | Feedthru , 3/8 inch O-seal , Ultra Torr Novellus |
| 7 | 22-00391-00 | O-ring , 0.864 " * 0.070 " Viton Parker 2-020-V747-75 |
| 8 | 15-00475-00 | Insullator , Gas Feedthru , Ceramic Novellus |
| 9 | 22-00021-01 | O-ring , 1.984" *0.139" , Buna parker 2-226-N741-70 |
| 10 | 15-00686-00 | Washer , Feedthru , 1/2 " ID , Alum Novellus |
| 11 | 15-00229-00 | Nut , Hex , 1/2-20 ,Alum Novellus |
| 12 | 15-00309-00 | Hanger ,Nozzle 1.33 " 150mm Novellus |
| 12 | 15-00309-01 | Hanger , Nozzle , 1.50" 200mm Novellus |
| 13 | 20-00212-00 | Nut , 8-32 UNC -2B , Alum Novellus |
| 14 | 15-00027-02 | Guide , Nozzle Adjuster Noveellus |
| 15 | 15-00043-02 | Adjuster , Ceramic , Gas plate Novellus |
| 16 | 16-033932-00 | Showerhead , Pinned , 150mm Novellus |
| 16 | 16-033931-00 | Showerhead , Pinned , 200mm Novellus |
| 16 | 16-033933-00 | showerhead Pinned , 200mm , Hi-Dep Rate Novellus |
| 17 | 16-00089-00 | Plate , Gas distribution , Top Novellus |
| 18 | 22-00239-00 | O-ring , 5.984 * 0.139 , Viton parker 2-258-V747-70 |
| 19 | 16-00013-01 | Chamber , Gas Distrib , 150mm Noveellus |
| 19 | 16-00110-00 | chamber , Gas dist , 200mm Novellus |
| 20 | 16-00090-00 | Plate , Gas distribution , bottom Novellus |
| 21 | 22-00300-00 | Cap , VCR ,14" ,SS Cajon SS-4-VCR-CP |
| 22 | 15-11606-00 | Insulator , Gas Dist , Ceramic Novellus |
| 23 | 15-00003-02 | Plate , Top (Process ) 150mm Novellus |
| 23 | 15-00601-00 | Plate , Top (process) 200mm Novellus |
