3.3 RF Distribution Assembly
| 1 | 15-01022-00 | Plate, RF Dist , Copper 150mm Novellus |
| 2 | 15-01023-00 | Plate, RF Dist , Copper 200mm Novellus |
| 3 | 17-00176-00 | Drum , RF Dist Novellus |
| 4 | 15-01208-01 | Plate , RF Dist , Top , Mod , Novellus |
| 5 | 15-00208-00 | Bracket , Distrib Tuner , Support 150mm novellus |
| 5 | 15-00614-00 | Post , Distribution Tuner 200mm Novellus |
| 6 | 15-00462-00 | Plate , RF Dist , Insualtion 150mm novellus |
| 6 | 15-00602-00 | Plate , RF Dist , Insulation 200mm novellus |
| 9 | 15-01219-00 | Base , Inductor 200mm dual freq Noveellus |
| 10 | 02-00105-00 | Capacitor assy , with jumper novellus |
| 11 | 03-00306-00 | Inductor Assy , 150 uH , 150MM dUAL Freq Novellus |
| 11 | 03-00314-00 | Inductor assy , 50uH , 200MM Dual Freq Novellus |
| 12 | 21-00222-00 | Screw , PanHd , 6-32 * 5/8 inch Common |
| 14 | 21-00253-00 | Screw , FltHd , 6-32 * 1 iinch common |
| 15 | 20-00275-00 | Screw , PanHd , 6-32 * 3/4 inchi common |
| 16 | 20-00156-00 | Washer , Flat #6 , Ni/Br Common |
| 17 | 20-00157-00 | Washer , Lock , #6 Ni/Br common |
| 18 | 20-00158-00 | Nut , Hex , 6-32 Ni/Br Common |
| 19 | 31-00202-00 | Clamp , Cable , 1/2 inch ID , poly Novellus |
| 21 | 17-00224-00 | Cover ,RF , Teos , Novellus |
| 22 | 19-00250-00 | Screw , Thumb , Modified Novellus |
| 25 | 20-00271-00 | Screw , Thumb , 10-32 common |
| 26 | 17-00306-00 | Cover , Divert Novellus |
