3.4 Chamber Ring Assembly
| 1 | 15-00566-00 | Chamber Ring , Reactor , 150mm Novellus |
| 1 | 15-00603-00 | Chamber Ring , Reactor , 200mm Novellus |
| 2 | 22-00235-00 | O-ring , 30.12" * 0.275 " , Viton , 150mm parker 3-012 |
| 2 | 22-00361-00 | O-ring , 31.12" * 0.275" , Viton , 200mm Parker 3-112 |
| 3 | 31-00176-00 | Gasket , Wire Mesh , RF shield , Tek - Nit 20-31101 |
| 4 | 22-002236-00 | O-ring , 7.45" *0.275" , Viton , 150mm parker 2-443 |
| 4 | 22-00658-00 | O-ring , 7.475 " * 0.275 " , Kalrez , 200mm Dupont 2-443-K4079 |
| 5 | 21-00083-00 | Nut , Hex , 1/4 -20 , SS common |
| 6 | 15-00092-00 | Clamp, Loadlock Port Novellus |
| 7 | 20-00177-00 | Stud , Threaded ,1/4 -20* 1.2" SS common |
| 8 | 21-00071-00 | Washer , Lock , 1/4 " ,, SS common |
| 9 | 21-00065-00 | Washer , Flat , 1/4" , SS common |
| 10 | 22-00234-00 | O-ring , 7.48 " * 0.139" , Viton , 150mm PARKER 2-246 |
| 10 | 22-00656-00 | O-ring , 7.474" * 0.139" , Kalrez , 200mm Dupont 2-264-K4079 |
| 11 | 15-032014-00 | Window , Quartz , Etch Resistant Novellus |
| 12 | 17-032018-00 | Screen ,RF shield , Etched Novellus |
| 13 | 15-10489-00 | Clamp , chamber viewport Novellus |
| 14 | 21-00056-00 | screw , SKHd , 1/4 -20 *1 " , SS common |
| 15 | 15-00410-00 | Filter , UV , Lexan Novellus |
| 16 | 21-00055-00 | Screw , SKHd , 1/4 - 20 * 3/4 " , SS common |
| 17 | 15-00019-02 | Flange , Blankoff , Alum Novellus |
