4.1 Bottom plate - RF Shunt , heater ISO , Manometer Assy
1 15-00477-00 Plate, Bottom, 150mm Novellus 1 15-00619-00 Plate, Bottom , 200mm Novellus 6 10-00174-00 Manifold Assy , Cap manometer Novellus 13 15-00709-00 Shaft , Extender , Cap adjust novellus 14 29-00034-00 Capacitor , Air Cap , shunt novellus 24 17-00152-00 Strap , shunt capacitor novellus 71 22-00095-00 connector , 9/16 -18 ST * 3/8 " VCR Cajon SS-8-VCR-1-01081 74 60-00214-00 Manometer ,cap , 10 torr tylan CDL-11-S06 77 60-00194-00 Switch ,Diaphram pres , 20 Torr (NG) Precision Sens E48W-H14 82 60-00018-00 Clamp , Alum , NW25 HPS 31-2903 83 60-00050-00 Seal , Adapter ring ,KF25 /20 HPS 31-5813 93 60-00020-00 Flange , Blankoff , NW25 HPS 31-1603 94 60-00019-00 Ring , Centering ,O-ring , KF25 HPS 31-2603 99 15-01025-00 Ring , Cap manometer , ceramic Novellus 100 22-00022-00 Gasket / Retainer , VCR , 3/8" Cajon NI-8-VCR-2-GR 107 02-00167-00 RF shut Assy , 2 Caps Novellus 108 02-00399-00 Fitler Box Assy , Heater RF Isolation NG Novellus 108 02-00080-00 Filter Box Assy , Heater RF Iso . Novellus ( classic ) 110 02-00090-00 PCB Assy , Heater RF isolation Novellus 111 15-00470-00 Clamp , Air Duct Bellows Novellus 112 60-00106-00 Boot , Rubberized , 3" ID A & A Mfg Co DSF 113 03-00299-00 Inductor , RF Isolation CKt NG Novelllus 113 02-00085-00 Inductor , RF Isolation CKt classic Novellus 114 29-00014-00 Capacitor , RF Isolation Novellus
4.2 Bottom plate -- TC Assemblies
5 02-00206-00 Mounting Kit , TC Feedthru / Filter Novellus 6 22-00314-00 Fitting , 1/8" MPT -O *1/4 " Tube Swagelok SS-400-1-2-OR 7 15-00684-00 Cap, TC , 1/16" ID , Ceramic novellus 8 27-00079-00 Thermocouple , Type j, 1/16" Omega Engr ICIN-116U-12 9 19-00117-00 Bellows Assy , Thermocouple Novellus 13 15-00565-00 Bracket / Guard , TC Bellows Novellus 16 02-00205-00 Feedthru Assy , Thermocouple Novellus 17 02-00216-00 PCA assy , TC filter Novellus 18 15-00742-00 Tube , TC , Ceramic Novellus 19 22-00345-00 O-ring , 0.362" * 0.170" W parker 2-110 20 27-00127-00 Thermocouple ,Type E , LG Omega Engr EQIN-116G-12 21 22-00427-00 Nut , 1/4 " Tube , Ultra-Torr Cajon SS-4-UTN 22 20-00332-00 Ring , Retaining , 1/4" ,SS Truarc 5103-25H 23 15-00743-00 Washer , Retainer Novellus 24 22-00429-00 Sleeve , 1/4" Tube , Ultra-Torr Cajon ss-4-UTS 25 22-00358-00 O-ring , 0.239" *0.070" , Viton parker 2-010-V747-75 42 15-00567-00 Tube , TC , 1/8 " ID , Ceramic Novellus 72 22-00202-00 Fitting , 1/8 " SWG * 1/8 NPT Swagelok SS-200-1-2-OR-BT 75 27-00010-01 Thermocouple , Type J, 1/8 " Omega Engr ICIN-18U-12 102 22-00053-00 O-ring , 0.676" * 0.070" , viton parker 2-017-V747-70 109 15-00680-00 Sleeve , TC Ceramic Novellus 115 03-00166-00 Choke Assy , Lg Novellus 116 27-00123-00 PCB , Tc filter Novellus 117 03-00167-00 Inductor Assy Novellus
