4.3 Bottom plate - Heater AC Feedthrus
| 2 | 02-00081-00 | Box Assy, Heater AC Feedthru Novellus |
| 3 | 02-00081-01 | Box Assy , Heater Ac Feedthru Novellus |
| 4 | 02-00081-02 | Box assy , Heater AC Feedthru Novellus |
| 9 | 15-00311-00 | Nut , Cap , 1/4 -20 ,Ni Common |
| 11 | 15-00371-00 | Nut , Hex , 1/4 -20 ,Ni common |
| 12 | 22-00053-00 | O-ring , 0.676" * 0.070" , Viton parker 2-017-V747-70 |
| 47 | 19-00056-00 | Feedthru Assy , Electrical Novellus |
| 49 | 19-00120-01 | Conduit , Flexible, 6" Novellus |
| 50 | 19-00120-02 | Conduit , Flexible, 5“ Novellus |
| 95 | 02-00081-03 | Box Assy , Heater AC Feedthru Novellus |
