5.2 Spindle shaft assembly
2 15-01132-00 Housing , shaft Bearings Novellus 5 15-00357-00 Clamp , shaft coupling novellus 16 15-00418-00 spacer, 1" Bearing , Spindle Novellus 21 16-00088-00 Exhaust Box , RC foreline Novellus 26 15-00401-00 Shaft , Spindle Novellus 39 22-00256-00 O-ring , 3 1/2 " ID * 3 3/4 OD * 1/8 " W parker 2-238-V747-75 40 22-00288-00 T-seal , 15/16" ID * 1 3/16 OD parker B011- TR013-V4205A 41 19-034573-04 Bearing , Linear / Rotary , 1" Novellus 53 21-00048-00 Screw , SKHd , 8-32 * 1/2 " , SS common
