6.1 Loadlock Chamber Shell

1	15-01146-00	Panel, Side LL Novellus
2	60-00033-00	Filter , Backfill Millipore WGFG 40 H01
3	15-00216-01	Holder , LL Backfill Filter Novellus
4	22-00152-00	O-ring 4.600" * 0.210" , Buna Parker 2-350-N674-70
5	16-00047-00	Window , LL Top , Lexan Novellus
6	34-00125-00	Lamp , Reflector , 30W GE 30R20
7	34-00124-00	Fixture , Lighting GE PLK-1
8	60-00055-00	Gauge Tube , Vac , Convectron Granvill 275-185
9	22-00417-00	Gasket / Retainer , 1/4 " VCR , Ni Cajon NI-4-VCR-2-GR-VS
10	22-00093-00	Fitting , 9/16 -18 ST * 1/4" VCR Cajon SS-4-VCR-1-00032
11	16-00025-00	Window , LL Side , Lexan Novellus
12	22-00134-00	O-ring , LL window , 5.975" * 0.210" , Buna parker 2-361-N674-70
13	22-00326-00	O-ring , 27.18" * 0.275" , Buna parker 27.18 - N 674- 70
14	22-00136-00	O-ring, LL left plate , 15.475" * 0.275 " , Buna parker 2-460-N674-70