6.2 Loadlock Door Operator
20-00109-00 Lubricant , High vacuum sputt'd Films 117111 20-00214-00 Spring, Bearing, preload novellus 2 19-034573-03 Bearing , Rotary , 0.875" * 0.5" Novellus 3 20-00070-00 Ring ,Retaining , 0.5" Ext Berg Q2-50 4 22-00118-00 O-ring ,0.484" * 0.139" , Viton parker 2-218 5 22-00217-00 O-ring , 0.484" * 0.139" , Viton parker 2-206 6 20-00081-00 Bearing , Oil-Less Motion Ind B6-42 7 15-00138-00 Flag , Loadlock Door Sensor Novellus 8 15-00075-00 Bracket , LL Support Novellus 9 22-00657-00 O-RING , 7.975" * 0.210 " , Kalrez Dupont AS-568A-369 10 22-00132-00 Collar , Setscrew , 1/4 " shaft Motion Ind . CS-2Z 11 20-00064-00 Spring , Compression, 7/8" *0.36" Berg SPR1-7 12 15-00076-00 Arm , Swing Novellus 13 15-00803-00 shaft , swing arm novellus 14 16-00018-01 Door , Loadlock Novellus 15 19-00020-01 Shaft , LL Door , L.H . Novellus 16 19-00020-02 shaft , LL Door , R.H. Novellus 17 15-00094-00 Housing , LL Door Sensor Novellus 18 15-00306-00 Baseplate , LL Door Sensor Novellus 19 15-00307-00 Bracket ,Adj ,LL Door Sensor Novellus 20 03-00057-00 Harness Assy , Loadlock Door Sensor Novellus 21 15-00308-00 Bracket ,LL Door Sensor Novellus 22 15-00077-00 Link , Cylinder Novellus 23 19-00248-00 Ring , Clamping . LL DOOR , Mod . Novellus 24 15-00089-00 Pivot , Stand Novellus 25 19-00019-00 Pin , 1/4 " Dia , 1.38" L Novellus 26 60-00013-00 Cylinder , Pneumatic , LL Door Bimba 124.5 - DP 27 20-00072-00 Clevis , Piston Rod , 4" Stroke Bimba D231-1 28 60-00183-00 Elbow , Flow control , 1/4 " OD SMC NAS2200-F-N01-O75
