6.5 Cassette Door -02-00075-00
1 16-09479-00 Door ,LL w/ Window Openings Novellus 2 15-11690-00 Viewport , Cassette Chamber , Lexan Novellus 3 22-10062-00 O-ring , Viewport , 9.225" * 0.210" , Viton parker 2-374 5 15-01136-00 Bracket , Arm Novellus 8 15-00140-00 Flag , Cassette Door Sensor Novellus 11 15-00074-01 Bracket , Cylinder Adapter Novellus 12 19-00022-00 Shaft , Baffle Modification Novellus 13 15-00079-00 Block , Baffle Bearing Novellus 14 15-00437-00 Block, Pillow , R.H. Novellus 15 15-00445-00 Plate ,Stop Bracket Novellus 16 15-00438-00 Block , Pillow , L.H . Novellus 18 19-00049-00 Root , Rubberized , 5 " ID Novellus 29 20-00081-02 Bearing , 7/16" ID * 17/32" OD motion IND . DU14-18 30 20-00067-00 Clevis , with Clevis Pin ARO 20544 32 60-00012-00 Cylinder , Pneumatic , Cass Door ARO MQ2948-090 33 22-00084-00 Bearing , Ball , 0.1875* 0.375 Motion Ind .B 10-6 34 20-00074-00 Ring , Retaining , Ext , 3/16 Motion Ind Q2-18 35 22-00365-00 Tee, Branch, 1/4 " T SMC KQT07 -355 36 22-00366-00 Elbow , 1/4" MPT * 1/4 Tube SMC KQL07-355 61 60-00146-00 Valve , Quick Exhaust SMC NAQ2000-N02 63 60-00148-00 Silencer , 1/4 NPT SMC N2510-N002 66 03-00074-00 Harness assy , Cassette Door sensor Novellus 67 22-00430-00 Valve , Flow Control , 1/4 NPT * 1/4 Tube SMC NAS2210F-N02-075
6.6 Platform - 100 / 125/150 /200 MM , sense Pin
1 15-01115-00 Platform, Cassette （100/125/150mm ) Novellus 1 15-00606-00 Platform , Cassette 200mm novellus 2 15-01116-00 Bracket , Mult , cass. Holder (100 /125/ 150mm ) Novellus 2 15-00613-00 Blade , Bracket 200mm Novellus 3 15-00313-01 Blade , Wafer placement （100 /125/150 mm ) Novellus 3 15-01012-00 Blade , wafer placement 200mm Novellus 4 15-00314-01 Rod , wafer aligner Novellus 5 15-00312-00 Bracket , Wafer Pin (100 /125/150 mm ) Novellus 5 15-00611-00 Bracket , wafer pin 200mm Novellus 6 15-00316-00 Pin , Wafer Sensor Novellus 7 15-00293-01 Hook , Bracket , Right (100/125/150mm ) Novellus 7 15-00610-00 Hook , Bracket , Right 200mm Novellus 8 15-00293-02 Hook , Bracket , Left 100/125/150 mm Novellus 8 15-00609-00 Hook , Bracket , Left 200mm Novellus 12 34-032628-00 Switch , submin, 5A, 125-250 VAC cherry E61-30H 23 34-00010-01 Feedthru , Elec , 19 pin Hermetic Seal S7201-14-19 P Accessories 15-01052-00 Paddle , Dimple , 200mm Novellus 15-01049-00 Paddle , Dimple , 150mm Novellus 15-01048-00 Paddle , Dimple , 125mm Novellus 15-01047-00 Paddle , Dimple , 100mm Novellus 15-01063-00 Bracket , Paddle , 200mm Novellus 15-00485-00 Bracket , Paddle , 150mm Novellus 15-00486-00 Bracket , Paddle , 125mm Novellus 15-00487-00 Bracket , Paddle , 100MM Novellus 70-00053-00 Cassette, Metal , 150mm , Solid End H-square MC-6HC 70-00054-00 Cassette, Metal , 125mm , Solid End H-Square MC-5HC 70-00058-00 Cassette,Metal 200mm , Solid End H-Square MC-8HC
