6.8 Platform 200mm Opto-Sensor , Metal Cassettes (02-00349-00)
| 1 | 15-01109-00 | Platform , Cassette, optical 200mm Novellus |
| 2 | 15-00613-00 | Blade, Bracket Novellus |
| 3 | 15-01012-00 | Blade, Wafer placement 200mm novellus |
| 6 | 15-00609-00 | Hook ,Bracket , Left 200mm Novellus |
| 7 | 15-00609-00 | Hook, Bracket , Right 200mm Novellus |
| 9 | 20-00287-00 | Pin ,Dowell 1/8 " * 3/4 * 14 1/2" Novellus |
| 13 | 02-00343-00 | Harness Assy , Sensor , 25.5 " Novellus |
| 14 | 02-00330-00 | Board Assy , Sense Pin Breakout Novellus |
| 23 | 17-024434-00 | Flag , Opto-sensor Novellus |
| 15-01122-00 | Bracket ,Paddle , 200mm Novellus | |
| 70-00058-00 | Cassette, Metal , 200mm , Solid END H-SQUARE MC-8HC | |
| 15-01050-01 | Shims , Paddle , 0.001" Thk Novellus | |
| 15-01050-02 | Shims , Paddle , 0.002" Thk Novellus | |
| 15-01050-03 | Shims , Paddle , 0.003" Thk Novellus | |
| 15-01127-00 | Paddle , Optical , 200mm Novellus |
