7.1 Upper Shaft Assembly
1 15-00272-00 Flange, Centering Seal , 7.5" Novellus 2 15-00273-00 Baseplate ,WTM Novellus 4 15-00294-00 Clamp , 10" Bearing , Upper Novellus 5 15-00304-00 Clamp , 10" Bearing , Lower Novellus 6 15-00136-01 Flag , wtm Rotation Sensor Novellus 7 15-00640-00 Gear , WTM Housing , 10" Novellus 8 15-00639-00 Gear , Spur , Rotation Drive Novellus 12 15-00052-01 Housing , Inner shaft Seal novellus 16 15-00351-00 Cover , Outer shaft seal Novellus 17 15-00350-00 Housing , Outer shaft Seal Novellus 18 15-00058-00 Spacer , 1" Bearing , WTM Novellus 20 15-00329-00 Clamp , Bearing Retainier Novellus 22 15-00132-00 Flag , WTM Lift sensor Novellus 45 22-00227-00 Seal , Quad-Kup , 7.5" ID min Rubber PD8710478513c 46 22-00176-00 O-ring , 12.975" * 0.139" , Buna PARKER 2-455-n674-70 47 22-00333-00 O-ring , 10.81"*0.103" 48 22-00218-00 O-ring 0.487"*0.103" , Viton parker 2-112-V747-70 52 19-00063-00 Bearing , WTM Housing , 10" Motion Ind KC100XP0 64 19-00067-00 Bearing , 8/22 mm Motion Ind . 38H 65 20-00124-00 Washer , Spriing , 5/16" ID Motion Ind . SV-5 66 22-00053-00 O-ring , 0.676"*0.070" , Viton 67 22-00240-00 O-ring , 0.424"* 0.103" , Viton 68 22-00262-00 seal ,Outer shaft , 1" ID Am 69 22-00056-00 O-ring 1.362" * 0.103" , viton 70 19-034573-04 Bearing, Linear / Rotary , 1" Novellus
